| 摘要 |
<p>PURPOSE:To obtain a film having a high thermal resistance and high corrosion resistance, a high saturation magnetic flux density, an excellent soft magnetic characteristic and a good frequency characteristic by laminating soft magnetic thin films which have an atomic ratio composition expressed by a specific formula that shows a specific orientation in X-ray diffraction, through non- magnetic thin films. CONSTITUTION:Soft magnetic thin films 41 which have the atomic ratio composition expressed by the formula Fe100-x-y-zMxNiyNz (M is at least one kind of element selected among Mg, Ca, Ti, Zr, Hf, V, Nb, Ta, Cr, Mo, W, Mn and B, 0.1<=x<=15, 0<=y<=10, 0.1<=z<=15) that have the relative intensity ratio 1/3 of Fe(200) peak to Fe(100) peak are laminated through non-magnetic thin films 43. For example, the soft magnetic thin films 41 which are made of Fe87Zr10N3 and the non-magnetic thin films 43 are laminated alternately by RF magnetron sputtering, each 10 layers, on a base material 45 which is made of Mn-Zn ferrite, to form a soft-magnetic multilayer film 4.</p> |
