| 摘要 |
PURPOSE:To provide a gas laser device which can perform stable discharge even if a discharge repetition rate is raised and can perform high speed operation. CONSTITUTION:In a gas laser device having a main discharging electrode 5 and a pre-ionization electrode 22 in a discharging chamber 2 with gas laser medium sealed and with a discharging gap 24 formed on the pre-ionization electrode 22 for pulse-oscillating laser light by applying voltage to the main discharging electrode 5 and the pre-ionization electrode 22, the pre-ionization electrode 22 is equipped with bimetals 23,... which are deformed according to heat generation of the pre-ionization electrode 22 to vary the discharging gap 24. |
