| 摘要 |
PURPOSE:To offer a mask for a proximity exposure on which foreign matter is easy to stick to both surfaces of the mask is reduceable or unresolvable on a proximity exposure. CONSTITUTION:A groove 3 having constant width and depth is provided on a place corresponding to the outside dimension of a substrate 2 transferring the pattern of the mask 1, on its pattern surface. A resist 4 with which the substrate 2 is coated is risen so as to form a projection, on the outer peripheral part, and the groove 3 fitting into the projection is on the surface of the mask 1. On the other hand, a mask cover 7 on which a glass plate 6 is fixed on the upper side of a frame 5 which is more or less larger than the outside diameter of the mask 1, is provided on the side opposite to the pattern surface. Therefore, yielding is improved, and simultaneously, cost can be reduced. Thus, an effect that a contribution is made to reduction in the cost of a product that plotting by the proximity exposure is carried out, is expected. |
