首页
产品
黄页
商标
征信
会员服务
注册
登录
全部
|
企业名
|
法人/股东/高管
|
品牌/产品
|
地址
|
经营范围
发明名称
ELECTRON BEAM LITHOGRAPHY BY VARIABLY FORMING TYPE CHARGED ELECTRON PARTICLE
摘要
申请公布号
JPH04240718(A)
申请公布日期
1992.08.28
申请号
JP19910023917
申请日期
1991.01.24
申请人
JEOL LTD
发明人
OKINO TERUAKI
分类号
H01L21/027
主分类号
H01L21/027
代理机构
代理人
主权项
地址
您可能感兴趣的专利
System and method for internet community building, website popularization and distribution of E-commerce products
Analyzing text streams for cue points of advertisements in a media stream
Systems and methods for matching venues and attractions
Methods and systems for employing dynamic risk-based scheduling to optimize and integrate production with a supply chain
Method for creating medical treatment models from a database of medical records
System and method for verifying medical device operational parameters
Systems and methods for determining the N-best strings
Apparatus and method for generating noise adaptive acoustic model for environment migration including noise adaptive discriminative adaptation method
Speech and noise models for speech recognition
General framework to predict parametric costs
Angular velocity sensor correcting apparatus for deriving value for correcting output signal from angular velocity sensor, angular velocity calculating apparatus, angular velocity sensor correcting method, and angular velocity calculating method
Apparatus and method for processing information concerning biological condition, system, program and recording medium for managing information concerning biological condition
System, module, and method for generating procedure data used in an avionics system
Method of operating a spark ignition type internal combustion engine
Driving-force control apparatus for vehicle
Air-conditioner controlling device
Vehicle and control method of vehicle
Communication apparatus
Dynamically reconfigurable distributed interactive voice response system
Method and apparatus for data recovery
