| 摘要 |
PURPOSE:To prevent an excessive rise in temperature of a pre-ionization electrode to perform stable high speed operation by providing a piezoelectric element which electrostrictively vibrates to displace at least one set of spark pins and changes a relative position of a discharging portion of the respective sets of spark pins as pulse discharge proceeds. CONSTITUTION:A main discharging electrode 5 and a pre-ionization electrode 22 are provided in a discharging chamber 2. The pre-ionization electrode 22 comprises anode spark pins 22a... and cathode spark pins 22b.... A bimorph piezoelectric elements 27, 27 are electrostrictive with voltage output from a charging power source 8 applied to have the anode spark pins 22a... vibrated. The bimorphs 27, 27 vibrate the anode spark pins 22a... to vary relative positions of respective sets of spark pins 22a...,22b... and displace tips of the anode spark pins 22a... along horizontal parts 23... of the cathode spark pins 22b.... |
