STAMPER FOR HIGH-DENSITY RECORDING DISK AND PRODUCTION THEREOF

摘要

PURPOSE:To provide a specific pit width and length by etching resist films of signal patterns formed by a prescribed method on a glass plate as a mask to a prescribed depth. CONSTITUTION:The photoresist 11 is applied uniformly at a prescribed thickness on the surface of the glass substrate 10 polished to a high density and is prebaked under prescribed conditions. Guide grooves are then recorded by a prescribed laser beam 12 to crosslink exposed parts 13; thereafter, the entire surface is simultaneously exposed and the parts 11A not subjected to the laser exposing are dissolved by an alkali, by which projecting patterns are obtd. The remaining photoresists are removed by dry etching the resists as the mask. The stamper having the min. pit width ranging 0.15 to 1.00mum is obtd.