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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH04240748(A)
申请公布日期
1992.08.28
申请号
JP19910007509
申请日期
1991.01.25
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
MATSUO TAKAHIRO;HASHIMOTO KAZUHIKO;HIRAI YOSHIHIKO;NOMURA NOBORU
分类号
H01L21/302;H01L21/3065;H01L21/316;H01L21/76;H01L27/08
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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