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发明名称
PLASMA PROCESSING DEVICE
摘要
申请公布号
JPH04240727(A)
申请公布日期
1992.08.28
申请号
JP19910007052
申请日期
1991.01.24
申请人
MITSUBISHI ELECTRIC CORP
发明人
IKUSHIMA TAKAYUKI;OKU KOJI
分类号
H01L21/302;H01L21/3065
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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