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发明名称
LIQUID EPITAXIAL GROWTH DEVICE
摘要
申请公布号
JPH04240184(A)
申请公布日期
1992.08.27
申请号
JP19910006850
申请日期
1991.01.24
申请人
SUMITOMO ELECTRIC IND LTD
发明人
YAMASHITA MASASHI
分类号
C30B19/06;C30B29/40;H01L21/208
主分类号
C30B19/06
代理机构
代理人
主权项
地址
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