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发明名称
SEMICONDUCTOR WAFER HANDLING DEVICE
摘要
申请公布号
JPH04239148(A)
申请公布日期
1992.08.27
申请号
JP19910001821
申请日期
1991.01.11
申请人
NEC CORP
发明人
NAKAMURA SEIICHI
分类号
H01L21/66
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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