| 摘要 |
PURPOSE:To enhance denseness and heat conductivity by molding and nitriding Al2O3, powder mixed with a powdery sintering aid for AlN and carrying out sintering in an N2-contg. atmosphere. CONSTITUTION:A powdery sintering aid for AlN, an org. binder and water are added to Al2O3, powder and they are kneaded and press-molded to obtain a molded body of <=15mm thickness. This molded body is nitrided by heating to 1,400-1,700 deg.C in a nonoxidizing atmosphere contg. at least NH3 or NH3 and gaseous hydrocarbon and then the nitrided body is sintered by heating to >=1,700 deg.C in an atmosphere contg. at least N2. |
