| 摘要 |
<p>PURPOSE:To provide a means, which detects whether a quartz boat is put on a lifter or not prior to inserting it into a heating furnace, to automatically perform the operation of storing a wafer in the quartz boat and inserting this quartz boat on the lifter and inserting it into the heating furnace and taking it out after finish of heating so as to make the wafer being the substrate of a semiconductor an impurity type semiconductor by CVD technique. CONSTITUTION:When lowering a supporting arm in the condition that a quartz boat is placed on the supporting arm of a lifter and next elevating the supporting arm into a furnace so as to insert it into a furnace, as a detector for detecting whether the quartz boat is placed or not at the point of time when the supporting arm reaches the lowering end, at least a pair of photosensors, which are arranged catching the quartz boat from both sides, or limit switches, which are arranged below the supporting arm and operates by the weight of the quartz boat, are arranged. By the photosensors or the limit switches, the existence of the quartz boat can be checked easily.</p> |
