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发明名称
FORMATION OF DIAMOND FILM ON SI SUBSTRATE BY CVD METHOD
摘要
申请公布号
JPH04240188(A)
申请公布日期
1992.08.27
申请号
JP19910005303
申请日期
1991.01.21
申请人
TOYOTA MOTOR CORP
发明人
TAKI MASAYOSHI
分类号
C30B29/04
主分类号
C30B29/04
代理机构
代理人
主权项
地址
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