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发明名称
摘要
申请公布号
JPH0453096(B2)
申请公布日期
1992.08.25
申请号
JP19860149818
申请日期
1986.06.27
申请人
TOKYO SHIBAURA ELECTRIC CO
发明人
EZAWA HIROKAZU
分类号
H01L21/60
主分类号
H01L21/60
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