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发明名称
DETECTING DEVICE OF THREE-DIMENSIONAL SHAPE OF PATTERN
摘要
申请公布号
JPH04236307(A)
申请公布日期
1992.08.25
申请号
JP19910004883
申请日期
1991.01.21
申请人
NEC CORP
发明人
YOSHIKAWA TAMAYASU
分类号
G01B11/06;G01B11/24;G01B11/245;H01L21/66
主分类号
G01B11/06
代理机构
代理人
主权项
地址
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