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发明名称
FORMATION OF TITANIUM NITRIDE FILM
摘要
申请公布号
JPH04236760(A)
申请公布日期
1992.08.25
申请号
JP19910002734
申请日期
1991.01.14
申请人
TOYOTA MOTOR CORP
发明人
AOYAMA SATOSHI
分类号
C23C14/06;C23C14/22;C23C14/48
主分类号
C23C14/06
代理机构
代理人
主权项
地址
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