发明名称 AUTOMATIC DOOR OPENING AND CLOSING APPARATUS FOR OPTICAL INSPECTING APPARATUS
摘要 <p>PURPOSE:To improve the operating rate of an apparatus by detecting the hand of an automatic handling mechanism for conveying works with an optical sensor provided in front of a window, operating an air cylinder by the detected signal, and opening and closing the door. CONSTITUTION:A work 3 is caught with a hand 51 of a handling mechanism 5. The hand 51 is moved with a driving part 52. When the hand 51 reaches a part in front of a cabinet 1, the hand 51 is detected with an optical sensor 61 of a control part 6. The detected signal is supplied into a controller 62, and air cylinder 47 is operated and a door 41 is opened. Then, the hand 51 further advances. The work 3 is mounted on a mounting stage in the cabinet 1. Thereafter, the hand 51 is moved back. When the detected signal of the optical sensor 61 becomes OFF, the operation of the air cylinder 47 is stopped, and the door 41 is closed. The takeoff of the work 3 is performed by the same way. Thus, the opening and closing of the door are automated, and the operating rate of the apparatus can be improved.</p>
申请公布号 JPH04235336(A) 申请公布日期 1992.08.24
申请号 JP19910012726 申请日期 1991.01.09
申请人 HITACHI ELECTRON ENG CO LTD 发明人 TATARA NOBORU;NAKADAI TSUTOMU;HONGO TSUTOMU
分类号 G01B11/30;G01N21/84;G01V8/12;G11B5/84;G11B25/04;H01L21/66 主分类号 G01B11/30
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