X-RAY DIFFRACTING APPARATUS AND USING METHOD THEREOF

摘要

PURPOSE: To measure the intensity of beam propagated by selecting a proper filter from a plurality of filters to insert the same regardless of the change of the parameter of a sample by allowing the same to correspond to the linear operation range of a proportional counter. CONSTITUTION: Reflecting intensity changes as a function of a material within a predetermined change range of the angle θbetween beam and the surface of a sample. A means 6 inserting a plurality of filters different in absorption coefficient in the gap between a light receiving slit 5 and a graphite monochrometer 7 is provided so as to be capable of continuously using a proportional counter within a linear operation range even if the angle θ and the reflecting intensity are any values and the absorbing quantity of the filter 62 is properly selected as the function of reflecting intensity by an automating system 20 so as to always operate the counter 8 within the linear operation range. The signal Y from the counter 8 is processed as the function of data X composed of the angle θ to automatically determine a parameter value.