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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH04234113(A)
申请公布日期
1992.08.21
申请号
JP19900417133
申请日期
1990.12.28
申请人
MITSUBISHI ELECTRIC CORP
发明人
ITO KAZUHIKO
分类号
H01L21/265;H01L21/338;H01L29/812
主分类号
H01L21/265
代理机构
代理人
主权项
地址
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