| 摘要 |
PURPOSE:To obtain a correct measurement result with high reproducibility even when a face blur occurs on the surface of a thin film sample. CONSTITUTION:A thin film sample 5 is driven by a sample base pulse motor 3 and rotated in the plane for an integral number of times centering on the horizontal axis PHI during the sampling period for measuring the intensity of diffracted X-rays with an X-ray detector 16. X-ray diffraction measurement is performed on the surface of the thin film sample 5 with a face blur while the face blur position invariably passes the same position by integer times. Fluctuation of individual sampling conditions due to the face blur becomes nil, and the X-ray diffraction measurement with high reproducibility can be performed. |
