| 摘要 |
PURPOSE:To provide manufacturing method of an oxygen sensor which enables sufficient improvement in response characteristic when lanthanum trifluoride is used as solid electrolyte. CONSTITUTION:A thin film 6 made of lanthanum trifluoride is formed on one surface of a silicon substrate 2 through an insulation film 5. Thereafter, the thin film undergoes a surface heat treatment while being kept in a high temperature. |
