| 摘要 |
<p>PURPOSE:To easily obtain information by combining exposure data and control information relating to a method for controlling reticle or mask. CONSTITUTION:The method is characterized by fetching the attendant information of an arbitrary reticle or mask from an information file, and combining the relevant control information and the exposure data of the corresponding reticle or mask, thereby generating fresh exposure-data, the position where the above-mentioned control information is joined preferably after the end of the exposure-data.</p> |
