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发明名称
ELEMENT ISOLATION FORMING METHOD
摘要
申请公布号
JPH04234145(A)
申请公布日期
1992.08.21
申请号
JP19900418463
申请日期
1990.12.28
申请人
NEC CORP
发明人
SATO HIROSHI
分类号
H01L21/76;H01L21/316
主分类号
H01L21/76
代理机构
代理人
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地址
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