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发明名称
FORMATION OF THIN METAL FILM
摘要
申请公布号
JPH04232259(A)
申请公布日期
1992.08.20
申请号
JP19900408741
申请日期
1990.12.28
申请人
SHARP CORP
发明人
TOKUMARU TERUTAKA;TAKANO TOSHIHIKO;INOUE YOSHIHISA;YANO KOZABURO;OKADA YOSHIO
分类号
C23C14/34
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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