发明名称 Semiconductor film analogue investigation method for duration wave HFETs mfr. - evaluating photoluminescence spectrum to identify high charge carrier density component rates
摘要 The method takes a photoluminescence spectrum of the semiconducting layer structure after manufacture of the component plates. The energy band interval of the spectrum is compared with the two=dimensional state density of a suitable referernce curve and the charge carrier density of the hetero-structure quantum wave derived directly from it. The HFET is finally manufactured. USE/ADVANTAGE - Enables suitable component plates, i.e. those with high charge carrier density in conducting channel, to be rapidly and simply identified.
申请公布号 DE4105018(A1) 申请公布日期 1992.08.20
申请号 DE19914105018 申请日期 1991.02.19
申请人 DAIMLER-BENZ AKTIENGESELLSCHAFT, 7000 STUTTGART, DE 发明人 BRUGGER, HANS, DR.RER.NAT., 7913 SENDEN, DE
分类号 G01R31/265 主分类号 G01R31/265
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