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发明名称
VERFAHREN ZUR HERSTELLUNG EINER SCHICHT AUS EINEM METALLOXIDISCHEN SUPRALEITERMATERIAL MIT HOHER SPRUNGTEMPERATUR UND VORRICHTUNG ZUR DURCHFUEHRUNG DES VERFAHRENS.
摘要
申请公布号
DE58901824(D1)
申请公布日期
1992.08.20
申请号
DE19895001824
申请日期
1989.02.13
申请人
SIEMENS AG, 8000 MUENCHEN, DE
发明人
KIESER, DR., JOERG, W-8550 FORCHHEIM, DE
分类号
C30B1/02;C30B29/22;H01L39/24;(IPC1-7):H01L39/24
主分类号
C30B1/02
代理机构
代理人
主权项
地址
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