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发明名称
ELEMENT SEPARATION METHOD OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH04230034(A)
申请公布日期
1992.08.19
申请号
JP19900416565
申请日期
1990.12.27
申请人
RICOH CO LTD
发明人
KISHIMOTO AKIKO
分类号
H01L21/76;H01L21/316
主分类号
H01L21/76
代理机构
代理人
主权项
地址
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