| 摘要 |
PURPOSE: To easily remove a rim part overhung at a recessed part by pouring a fluid material, whose volume is changed at the time of hardening onto a surface layer and inside the recessed part, hardening it, breaking the rim part from the remaining part of the surface layer, and removing the rim part of the surface layer along with the hardened fluid material. CONSTITUTION: A hardenable fluid material 15, whose volume changes at the time of hardening, is poured onto the upper side of a surface layer 10 and inside a recessed part 14. Thus, the rim part 10a is immersed by a fluid material 15. Then, the fluid material 15 is hardened, the volume is changed, and the rim part 10a is broken from the remaining part 10b of the surface layer 10. Thereafter, a hardened fluid material 150 is removed along with the rim part 10a of the surface layer 10. As a hardenable fluid material, easily utilized resist in the manufacturing field of semiconductors is preferable.
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