VACUUM PROCESSING DEVICE FOR WAFER,申请号JP19910115312-传众专利搜索

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发明名称	VACUUM PROCESSING DEVICE FOR WAFER
摘要
申请公布号	JPH04230945(A)	申请公布日期	1992.08.19
申请号	JP19910115312	申请日期	1991.04.18
申请人	TOKYO ELECTRON LTD	发明人	IMAHASHI KAZUNARI
分类号	C23C14/56;H01J37/317;H01L21/265	主分类号	C23C14/56
代理机构		代理人
主权项
地址

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