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发明名称
PROCESSING APPARATUS AND METHOD
摘要
申请公布号
EP0299248(B1)
申请公布日期
1992.08.19
申请号
EP19880110011
申请日期
1988.06.23
申请人
TEXAS INSTRUMENTS INCORPORATED
发明人
LOEWENSTEIN, LEE M.;DAVIS, CECIL J.
分类号
C23C16/517;G03F7/30;G03F7/42;H01L21/027;H01L21/30;H01L21/302;H01L21/3065;H01L21/31;H01L21/677
主分类号
C23C16/517
代理机构
代理人
主权项
地址
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