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发明名称
SURFACE TREATMENT METHOD OF SEMICONDUCTOR
摘要
申请公布号
JPH04229624(A)
申请公布日期
1992.08.19
申请号
JP19910111457
申请日期
1991.05.16
申请人
HITACHI LTD
发明人
KETSUSAKO MITSUNORI;UEMATSU TSUYOSHI;KANDA KAZUYOSHI
分类号
H01L21/316;H01L21/26
主分类号
H01L21/316
代理机构
代理人
主权项
地址
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