MOISTUREPROOF MULTILAYERED STRUCTURE AND MANUFACTURE THEREOF

摘要

PURPOSE: To attain excellent barrier property by successively providing vacuum deposition layers of silicon monoxide and silicon dioxide on a base body. CONSTITUTION: The 1st barrier layer composed of SiO having 10-75nm layer thickness is formed on the surface of an optical waveguide device. And the 2nd barrier layer composed of SiO2 having >=20nm layer thickness is formed on the surface of the 1st barrier layer. The thickness of both layers is selected so as to attain a desired barrier property and by coexisting both layers, more excellent barrier property than sum total of the individual barrier property of both layers is attained.