发明名称 Scanning reflection electron diffraction microscope.
摘要 <p>A scanning reflection electron diffraction microscope causes a primary electron beam (4) from its electron gun (2) to be reflectively diffracted from a sample (7) and a diffraction pattern to be formed on fluorescent screen (9). An optical lens (10) reduces this diffraction pattern in size and forms its reduced image on a photoelectric surface (11), thereby producing an image-carrying electron beam. Deflected by a deflecting system including a deflecting coil (12) and a condenser coil (13), the image-carrying electron beam is detected by an electron-multiplier (15) such that a diffraction pattern is displayed on a cathode ray tube (19). &lt;IMAGE&gt;</p>
申请公布号 EP0499490(A2) 申请公布日期 1992.08.19
申请号 EP19920301263 申请日期 1992.02.17
申请人 SHIMADZU CORPORATION 发明人 MARUI, TAKAO
分类号 H01J37/28;G01Q30/02;G01Q30/04;H01J31/48;H01J37/22;H01J37/29;H01J37/295 主分类号 H01J37/28
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