发明名称 |
CLEAN TRANSFER METHOD AND SYSTEM THEREFOR |
摘要 |
A clean transfer method capable of safely transferring a semiconductor or the like to various apparatus for treating the semiconductor while keeping the environment clean. In the method, the semiconductor is transferred between a vacuum clean box arranged in a clean room and kept at the degree of vacuum of 1 Torr or less and a vacuum chamber arranged in a maintenance room while transfer ports of the vacuum clean box and vacuum chamber are kept air-tightly connected to each other. The vacuum clean box is movably arranged.
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申请公布号 |
US5139459(A) |
申请公布日期 |
1992.08.18 |
申请号 |
US19910662556 |
申请日期 |
1991.02.28 |
申请人 |
TDK CORPORATION |
发明人 |
TAKAHASHI, TETSUO;MIYAUCHI, EISAKU;MIYAJIMA, TOSHIHIKO |
分类号 |
B65D6/40;B65G49/00;B65G49/07;C23C14/56;H01L21/00;H01L21/677 |
主分类号 |
B65D6/40 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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