| 摘要 |
<p>A method that is based on processing a substance (7) to any desired form based on altering the energy distribution of the laser (1) beam so that the substrate (7) can be processed to the desired spatial structure in a parallel fashion, even for lasers (1) that have poor beam quality such as low spatial or temporal coherence or unreproducible multimode structure or poor beam pointing stability by using a method of beam homogenization (3) like a channel integrator and altering the profile of the beam with appropriate optical elements (2, 4, 5, 6) based on the principles of geometric optics, such as aspherical lenses or mirrors whose surfaces are derived by mathematical solutions that are related to the desired energy redistribution and by working in a region where the material laser (1) interaction's dependence on energy is known.</p> |
