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发明名称
CATHODE SPUTTERING APPARATUS
摘要
申请公布号
JPH04228565(A)
申请公布日期
1992.08.18
申请号
JP19910079744
申请日期
1991.04.12
申请人
LEYBOLD AG
发明人
KURAUSU HARUTEIKU;YOAHIMU SUTSUCHIRUBOFUSUKII
分类号
C23C14/34
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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