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发明名称
METHOD OF DEFINING CRYSTAL DIRECTIONS @110@ IN SEMICONDUCTOR MATERIALS OF @@@ TYPE
摘要
申请公布号
SU1755335(A1)
申请公布日期
1992.08.15
申请号
SU19904837887
申请日期
1990.06.12
申请人
NII POLUPROVODNIKOVYKH PRIBOROV
发明人
VOZMILOVA LIDIYA N,SU;PENINA MARINA A,SU
分类号
H01L21/66
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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