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发明名称
VERFAHREN UND VORRICHTUNG ZUR KONTINUIERLICHEN HERSTELLUNG EINES ISOLIERTEN SUBSTRATES.
摘要
申请公布号
AT78522(T)
申请公布日期
1992.08.15
申请号
AT19840114295T
申请日期
1984.11.27
申请人
KANEGAFUCHI KAGAKU KOGYO KABUSHIKI KAISHA
发明人
NAKAYAMA, TAKEHISA;NISHIMURA, KUNIO C/O KANEGAFUCHI KAGAK;CHOME;TSUGE, KAZUNORI;TAWADA, YOSHIHISA
分类号
C23C14/02;C23C14/56;C23C16/02;C23C16/54;H01L31/0392;H01L31/20;H05K1/05;(IPC1-7):C23C14/02;H01L31/02;H01L31/18
主分类号
C23C14/02
代理机构
代理人
主权项
地址
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