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发明名称
METHOD OF EXCITING STREAMER DISCHARGE OF SPECIFIED TYPE IN HEXAGONAL SEMICONDUCTORS
摘要
申请公布号
SU1755336(A1)
申请公布日期
1992.08.15
申请号
SU19904878458
申请日期
1990.10.30
申请人
INSTFIZ IM.B.I.STEPANOVA
发明人
GRIBKOVSKIJ VIKTOR P,SU;RUSAKOV KONSTANTIN I,SU;PARASHCHUK VALENTIN V,SU
分类号
H01L21/66
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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