| 摘要 |
<p>PURPOSE:To improve a stocker for vertically storing wafer cassette charged with wafers. CONSTITUTION:There are provided a first stocker 15 for storing ordinary wafer cassettes 3 and a second stocker 19 for storing special wafer cassettes 6. A transfer device 23 having a swivel mechanism is provided between the first and second stockers. This constitution makes it easy to transfer wafer cassettes from one stocker to the other.</p> |
