| 摘要 |
PURPOSE:To provide a method for treating resist excellently without attachment of gas to a transmitting window even under normal atmosphere even though the gas is generated by the irradiation of ultraviolet rays. CONSTITUTION:A transmitting window 8 is arranged between a high-voltage mercury lamp 1 which emits radiant light containing ultraviolet rays and resist 4 which is illuminated and treated with the radiant light. The atmosphere of air or inactive gas or the mixed gas thereof is formed in the vicinity of the transmitting window. Thus, the contamination of the transmitting window 8 with the gas generated from the resist 4 is reduced. |
