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发明名称
MOVPE METHOD AND DEVICE
摘要
申请公布号
JPH04225518(A)
申请公布日期
1992.08.14
申请号
JP19900408292
申请日期
1990.12.27
申请人
NIPPON SANSO KK
发明人
YAMAZAKI TOSHIAKI
分类号
H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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