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发明名称
COMPOSITION FOR DIFFUSION
摘要
申请公布号
JPH04225221(A)
申请公布日期
1992.08.14
申请号
JP19900413882
申请日期
1990.12.26
申请人
MITSUBISHI MATERIALS CORP
发明人
CHUMA AKIHIRO;NAGAMINE KAORU;FUKUJU AKIRA
分类号
H01L21/228
主分类号
H01L21/228
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代理人
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