| 发明名称 |
SURFACE PROTECTION MEMBER TO ELIMINATE CONTAMI- NATION INDUCED BY FINE PARTICLES CON- TAMINATION RESULTANT FROM DUST OR SOOT AND SURFACE PROTECTION METHOD USING THIS MEMBER |
| 摘要 |
|
| 申请公布号 |
JPH04226011(A) |
申请公布日期 |
1992.08.14 |
| 申请号 |
JP19910122386 |
申请日期 |
1991.04.24 |
| 申请人 |
COMMISS ENERG ATOM |
发明人 |
DEIDEIEERU KURUU;JIYATSUKU DABARU;JIYANNPIEERU RAZARI;FURANSOWA TORESHIRASU |
| 分类号 |
B08B5/02;B08B17/02;H01L21/02;H01L21/677 |
主分类号 |
B08B5/02 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
