| 摘要 |
<p>PURPOSE:To permit a wafer storing device used when storing and carrying a wafer for manufacturing a semiconductor to be cleaned by high cleanness when cleaned by regular maintenance. CONSTITUTION:An air driving means (3) which sends air to a carrier (2) which stores a wafer is removably provided on the carrier (2). The air driving means (3) is provided so as to permit a plate-shaped supporting part (10) which supports the carrier (2) to be integrated in the L-shape with an air supplying part (11) provided with built-in fan (16), air filter (15), etc.</p> |
