| 摘要 |
PURPOSE:To enable inspection of data after manufacture by describing the sizes and forms of historical marks whether exposure data formed at the time of manufacture of the reticles faithfully and correctly to designed data and pattern formation is executed in fidelity to the designed data, or not. CONSTITUTION:Whether patterns are formed in accordance with each data set in each step, or not, each time each data pattern-forming step D1-Dn has been completed, and prescribed marks M1-Mn showing methods for depicting pattern-forming parameters and the like are depicted on an original reticle plate by electron beams, thus permitting information on the hysteresis and effects of the data processing to be clearly recorded on the reticle as a kind of mark. |
