| 摘要 |
PURPOSE:To reduce the production cost and enhance the moisture resistance of the ink jet head by a method wherein a head base plate and a vibrating plate are composed of glass, a transparent conductive film consisting of SnO2 is provided on the vibrating plate and a piezoelectric element is adhered under pressure onto the film on the vibrating plate. CONSTITUTION:The glass-made base plate 7 is provided with a filter 2, passages 3, 5, a pressure chamber 4 and a nozzle 5 by lithography. Then the glass-made vibrating plate 8 is adhered to the base plate 7 by heat welding. After the heat welding the conductive film of SnO2 for use as an electrode on one side at the time of impressing a voltage on the piezoelectric element 9 is provided on the surface of the vibrating plate 8 by CVD process, beam vapor deposition, supptering, etc. The element 9 coated with epoxy resin containing no solid contents is placed on the film and is adhered to the film under pressure to produce contact points between the element 9 and the film. Accordingly, the ink jet head having excellent moisture resistance and permitting see through into the interior thereof can be obtained at a reduced production cost. |
