Tactile sensor for detecting compressive strain - has sensor film with associated read=out and protective films and preferred magnetisation direction, magnetostrictive sensor element

摘要

A tactile sensor has a sensor film (2) for converting a compressive strain into an optical or electrical parameter. The sensor film has a preferred magnetisation direction inclined to the surface normal at least in the region of a magnetostrictive sensor element. The inclination and/or magnitude of the magnetisation varies with the compressive strain. The sensor film, which consists at least partially of terbium-iron-cobalt, has an associated read out film (16) with magnetic exchange coupling and a protective film (20). USE/ADVANTAGE - The tactile sensor has an at least approximately linear response characteristic, is of simple design and can be relatively directly expanded to a matrix arrangement for position sensitive pressure measurement.