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发明名称
VACUUM ARC VAPOR-DEPOSITING DEVICE
摘要
申请公布号
JPH04224671(A)
申请公布日期
1992.08.13
申请号
JP19900406005
申请日期
1990.12.25
申请人
KOBE STEEL LTD
发明人
TAMAGAKI HIROSHI
分类号
C23C14/24;C23C14/32;H01J37/32
主分类号
C23C14/24
代理机构
代理人
主权项
地址
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