| 摘要 |
<p>A gas leakage testing device is designed to detect whether or not any leakage points are existed in a testing specimen (11). In a gas leakage test, the testing specimen (11) is stored in a testing container (12) in air tight manner, and then a leakage detector (19) searches the leakage point to be existed in the testing specimen (11) by use of probe gas. However, due to the existence of the probe gas component in the atmospheric air, a background noise must be occurred and it deteriorates the detection precision of the leakage detector. In order to avoid such drawback, the present invention is designed in accordance with a gas-leakage-testing method such that after or in the middle of the vacuum evacuation process to be made to the testing container (12) storing the testing specimen (11), substitute gas is introduced into the testing container and then probe gas is introduced into the inside of the testing specimen (11). Thus, it is possible to reduce the background noise, and consequently it is possible to detect the gas micro-leakage with accuracy. Preferably, helium (He) gas is employed as the probe gas, while nitrogen (N2) gas is employed as the substitute gas. <IMAGE></p> |
